Microchannels: Rapid Growth of a Nascent Technology
نویسندگان
چکیده
منابع مشابه
Etching Technology for Microchannels
can be varied from perfectly isotropic to exactly straight. Also positive or negative tapering is po~s ib le .~ Various ways of fabricating channels in silicon are The basic approach for disyussed. Some new channels are presented: the constructing channels in GPSIC's and the LPCVD covered channels. Also some silicon is almost always attention is paid to the problem of making connections as depi...
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ژورنال
عنوان ژورنال: Journal of Heat Transfer
سال: 2010
ISSN: 0022-1481,1528-8943
DOI: 10.1115/1.4000889